Focused Ion beam implantation of diamond

Maskless milling of diamond by a focused oxygen ion beam

Recent advances in focused ion beam technology have enabled high-resolution, maskless nanofabrication using light ions. Studies with light ions to date have, however, focused on milling of materials where sub-surface ion beam damage does not inhibit device performance. Here we report on maskless milling of single crystal diamond using a focused beam of oxygen ions. Material quality is assessed ...

Focused ion beam fabrication of boron-doped diamond ultramicroelectrodes.

The fabrication of ultramicroelectrodes (UMEs) for analytical electrochemical applications has been explored, using boron-doped diamond as the active electrode material in an insulating coating formed by deposition of electrophoretic paint. Because of the rough nature of the diamond film, the property of such coatings that is normally exploited in the fabrication of UMEs, namely the tendency to...

Characterization of Diamond-Like Film after Focused Ion Beam Processing

Optical properties (transmission and refractive index) and chemical structure (XPS) of diamond-like coating (DLC) film before and after focused ion beam milling (FIBM) process, were investigated in this paper. It is shown by our FIBM experiment that influence of FIBM on Optical properties and chemical structure of the DLC film is not apparent, especially in near-infra region. The film still ca...

Focused Ion Beam Lithography

Atomistic investigation of the wear of nanoscale diamond cutting tools shaped by focused ion beam

In recent years, micro/nanoscale diamond cutting tools shaped by focused ion beam (FIB) has been developed to the deterministic fabrication of micro/nano-structures owing to its unprecedented merits of high throughput, one-step, and highly flexible precision capabilities. However, the exposure of a diamond tool to FIB will result in the implantation of ion source material and the irradiation da...